%0 Thesis %1 michael-afdmabcf2017 %A Jurisch, Michael %C Stuttgart %D 2017 %K INES %R 10.18419/opus-9198 %T Ablenk-Systeme für die Multi-Elektronenstrahllithografie auf Basis CMOS-Kompatibler Fertigungsprozesse %U http://dx.doi.org/10.18419/opus-9198

@phdthesis{michael-afdmabcf2017, added-at = {2019-03-05T18:40:40.000+0100}, address = {Stuttgart}, author = {Jurisch, Michael}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/278002d014ea0a26840c24b454ebacf1f/kevin.konnerth}, doi = {10.18419/opus-9198}, institution = {Institut für Mikroelektronik}, interhash = {c4085d5de5f20779b218fe969b398376}, intrahash = {78002d014ea0a26840c24b454ebacf1f}, keywords = {INES}, month = {7}, note = 1594, school = {Universität Stuttgart}, timestamp = {2019-03-05T17:40:40.000+0100}, title = {Ablenk-Systeme für die Multi-Elektronenstrahllithografie auf Basis CMOS-Kompatibler Fertigungsprozesse}, type = {Dissertation}, url = {http://dx.doi.org/10.18419/opus-9198}, year = 2017 }