%0 Conference Paper %1 forster2015femtosecond %A Förster, Daniel J. %A Lucke, André %A Weber, Rudolf %A Graf, Thomas %B LAMP 2015 : the 7th International Congress on Laser Advanced Materials Processing : LPM 2015-the 16th International Symposium on Laser Precision Microfabrication : HPL 2015-the 7th International Symposium on High Power Processing %C Kitaykyushu %D 2015 %E Sugioka, Koji %I Japan Laser Processing Society %K hp ubs_10007 ubs_20011 ubs_30111 unibibliografie %T Femtosecond double pulse laser ablation of silicon

@inproceedings{forster2015femtosecond, added-at = {2020-12-22T15:44:57.000+0100}, address = {Kitaykyushu}, author = {Förster, Daniel J. and Lucke, André and Weber, Rudolf and Graf, Thomas}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/26cb6ec81fc71f88a1002a2d2fe7a1ace/unibiblio}, booktitle = {LAMP 2015 : the 7th International Congress on Laser Advanced Materials Processing : LPM 2015-the 16th International Symposium on Laser Precision Microfabrication : HPL 2015-the 7th International Symposium on High Power Processing}, editor = {Sugioka, Koji}, eventdate = {2015-05-26/2015-06-29}, eventtitle = {7th International Congress on Laser Advanced Materials Processing (LAMP); 16th International Symposium on Laser Precision Microfabrication (LPM 2015); 7th International Symposium on High Power Processing (HPL 2015)}, interhash = {8cd4db46ef307ddd37a4f9818f50323b}, intrahash = {6cb6ec81fc71f88a1002a2d2fe7a1ace}, keywords = {hp ubs_10007 ubs_20011 ubs_30111 unibibliografie}, language = {eng}, publisher = {Japan Laser Processing Society}, timestamp = {2020-12-22T14:44:57.000+0100}, title = {Femtosecond double pulse laser ablation of silicon}, venue = {Kitakyushu, Japan}, year = 2015 }