%0 Journal Article %1 bienert2024numerical %A Bienert, Florian %A Röcker, Christoph %A Graf, Thomas %A Abdou Ahmed, Marwan %D 2024 %I Optica %J Optics express %K oa ubs_10007 ubs_20011 ubs_30111 ubs_40311 unibibliografie wos %N 19 %P 34078-34085 %R 10.1364/OE.537063 %T Numerical determination of the substrate's zero-chirp geometry for the elimination of the period chirp in laser interference lithography %V 32

@article{bienert2024numerical, added-at = {2025-02-20T10:44:15.000+0100}, affiliation = {Bienert, F (Corresponding Author), Univ Stuttgart, Inst Strahlwerkzeuge IFSW, Pfaffenwaldring 43, D-70569 Stuttgart, Germany. Bienert, Florian; Roecker, Christoph; Graf, Thomas; Ahmed, Marwan Abdou, Univ Stuttgart, Inst Strahlwerkzeuge IFSW, Pfaffenwaldring 43, D-70569 Stuttgart, Germany.}, author = {Bienert, Florian and Röcker, Christoph and Graf, Thomas and Abdou Ahmed, Marwan}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/25e9ddac70b35aa2bf0def29d1ad5d15a/unibiblio}, doi = {10.1364/OE.537063}, interhash = {2a249e1bf387ed40a4f0f994404db258}, intrahash = {5e9ddac70b35aa2bf0def29d1ad5d15a}, issn = {1094-4087}, journal = {Optics express}, keywords = {oa ubs_10007 ubs_20011 ubs_30111 ubs_40311 unibibliografie wos}, language = {eng}, number = 19, pages = {34078-34085}, publisher = {Optica}, research-areas = {Optics}, timestamp = {2025-02-25T11:46:45.000+0100}, title = {Numerical determination of the substrate's zero-chirp geometry for the elimination of the period chirp in laser interference lithography}, unique-id = {WOS:001318746300011}, volume = 32, year = 2024 }