%0 Generic
%1 Wohl.2003
%A Wöhl, Gerd
%A Oehme, Michael
%A Parry, C.
%A Kasper, Erich
%A Jutzi, Michael
%A Berroth, Manfred
%A Voorneman, E.
%C presented at the 3rd International Conference on SiGe(C) Epitaxy and Heterostructures, Santa Fe, New Mexico, USA
%D 2003
%K Conference int
%T Special Etch Technologies for Ge/Si Devices
@conference{Wohl.2003,
added-at = {2020-11-09T08:41:21.000+0100},
address = {presented at the 3rd International Conference on SiGe(C) Epitaxy and Heterostructures, Santa Fe, New Mexico, USA},
author = {Wöhl, Gerd and Oehme, Michael and Parry, C. and Kasper, Erich and Jutzi, Michael and Berroth, Manfred and Voorneman, E.},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/241141bdbe6a50f426b148a2bf665c184/wolfgangvogel},
interhash = {f5d125628dacfb8f181f4618e2527001},
intrahash = {41141bdbe6a50f426b148a2bf665c184},
keywords = {Conference int},
timestamp = {2020-11-09T07:46:30.000+0100},
title = {Special Etch Technologies for Ge/Si Devices},
year = 2003
}