%0 Generic %1 Wohl.2003 %A Wöhl, Gerd %A Oehme, Michael %A Parry, C. %A Kasper, Erich %A Jutzi, Michael %A Berroth, Manfred %A Voorneman, E. %C presented at the 3rd International Conference on SiGe(C) Epitaxy and Heterostructures, Santa Fe, New Mexico, USA %D 2003 %K Conference int %T Special Etch Technologies for Ge/Si Devices

@conference{Wohl.2003, added-at = {2020-11-09T08:41:21.000+0100}, address = {presented at the 3rd International Conference on SiGe(C) Epitaxy and Heterostructures, Santa Fe, New Mexico, USA}, author = {Wöhl, Gerd and Oehme, Michael and Parry, C. and Kasper, Erich and Jutzi, Michael and Berroth, Manfred and Voorneman, E.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/241141bdbe6a50f426b148a2bf665c184/wolfgangvogel}, interhash = {f5d125628dacfb8f181f4618e2527001}, intrahash = {41141bdbe6a50f426b148a2bf665c184}, keywords = {Conference int}, timestamp = {2020-11-09T07:46:30.000+0100}, title = {Special Etch Technologies for Ge/Si Devices}, year = 2003 }