%0 Conference Paper %1 haist2020increasing %A Haist, Tobias %A Steinitz, Adriana %A Guerra, Flavio %B Optics and Photonics for Advanced Dimensional Metrology %C Bellingham %D 2020 %E Groot, Peter J. de %E Leach, Richard K. %E Picart, Pascal %I SPIE %K ubs_10007 ubs_20011 ubs_30114 ubs_40175 unibibliografie wos %N 11352 %P 1135204 %R 10.1117/12.2556800 %T Increasing the accuracy of imaging-based dimensional measurements %@ 978-1-5106-3477-0

@inproceedings{haist2020increasing, added-at = {2022-05-13T14:12:02.000+0200}, address = {Bellingham}, affiliation = {Haist, T (Corresponding Author), Univ Stuttgart, Inst Tech Opt, Pfaffenwaldring 9, D-70569 Stuttgart, Germany. Haist, Tobias; Steinitz, Adriana; Guerra, Flavio, Univ Stuttgart, Inst Tech Opt, Pfaffenwaldring 9, D-70569 Stuttgart, Germany.}, author = {Haist, Tobias and Steinitz, Adriana and Guerra, Flavio}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/21f1035d364c8b055d59eccd7822c6066/unibiblio}, booktitle = {Optics and Photonics for Advanced Dimensional Metrology}, doi = {10.1117/12.2556800}, editor = {Groot, Peter J. de and Leach, Richard K. and Picart, Pascal}, eventdate = {2020-04-06/2020-04-10}, eventtitle = {SPIE Photonics Europe, 2020}, interhash = {4bc5bf27e90eb14b62410ab1fbde6fb0}, intrahash = {1f1035d364c8b055d59eccd7822c6066}, isbn = {978-1-5106-3477-0}, keywords = {ubs_10007 ubs_20011 ubs_30114 ubs_40175 unibibliografie wos}, language = {eng}, number = 11352, pages = 1135204, publisher = {SPIE}, research-areas = {Instruments & Instrumentation; Optics; Physics}, series = {Proceedings of SPIE}, timestamp = {2022-05-13T12:12:02.000+0200}, title = {Increasing the accuracy of imaging-based dimensional measurements}, unique-id = {ISI:000671885800003}, venue = {Online}, year = 2020 }