Inproceedings,

A flexible stress sensor using a sub-10μm silicon chip technology

, , , , and .
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), page 2628-2631. Piscataway, New Jersey, IEEE, (2013)
DOI: 10.1109/Transducers.2013.6627345

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