%0 Conference Paper %1 conf/nems/LinCCHTCYHH15 %A Lin, Yu-Hsin %A Cheng, Yuan-Chieh %A Chu, Nien-Nan %A Hsu, Wensyang %A Tang, Yu-Hsiang %A Chen, Po-Li %A Yang, Chih-Chung %A Hsiao, Ming-Hua %A Hsiao, Chien-Nan %B NEMS %D 2015 %I IEEE %K dblp %P 491-493 %T The study of compensative structure assisted convex and concave corner structures etching by inductively coupled plasma-reactive ion etch (ICP-RIE). %U http://dblp.uni-trier.de/db/conf/nems/nems2015.html#LinCCHTCYHH15 %@ 978-1-4673-6695-3

@inproceedings{conf/nems/LinCCHTCYHH15, added-at = {2015-07-09T00:00:00.000+0200}, author = {Lin, Yu-Hsin and Cheng, Yuan-Chieh and Chu, Nien-Nan and Hsu, Wensyang and Tang, Yu-Hsiang and Chen, Po-Li and Yang, Chih-Chung and Hsiao, Ming-Hua and Hsiao, Chien-Nan}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/26d96e069e3289e3db60cac900e919c18/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2015}, ee = {http://dx.doi.org/10.1109/NEMS.2015.7147475}, interhash = {e4f4885ae59f5f6737bf015c3d5acc1a}, intrahash = {6d96e069e3289e3db60cac900e919c18}, isbn = {978-1-4673-6695-3}, keywords = {dblp}, pages = {491-493}, publisher = {IEEE}, timestamp = {2016-02-02T15:31:04.000+0100}, title = {The study of compensative structure assisted convex and concave corner structures etching by inductively coupled plasma-reactive ion etch (ICP-RIE).}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2015.html#LinCCHTCYHH15}, year = 2015 }