%0 Journal Article %1 journals/mr/YuLWFDP16 %A Yu, D. Q. %A Lau, W. S. %A Wong, Hei %A Feng, Xuan %A Dong, Shurong %A Pey, Kin Leong %D 2016 %J Microelectronics Reliability %K dblp %P 95-98 %T The variation of the leakage current characteristics of W/Ta2O5/W MIM capacitors with the thickness of the bottom W electrode. %U http://dblp.uni-trier.de/db/journals/mr/mr61.html#YuLWFDP16 %V 61

@article{journals/mr/YuLWFDP16, added-at = {2018-11-30T00:00:00.000+0100}, author = {Yu, D. Q. and Lau, W. S. and Wong, Hei and Feng, Xuan and Dong, Shurong and Pey, Kin Leong}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/23e140dc03eab81b77e24c58d5c2df283/dblp}, ee = {https://doi.org/10.1016/j.microrel.2016.02.013}, interhash = {e346662c60040b2bdc10e9f4f6d131e6}, intrahash = {3e140dc03eab81b77e24c58d5c2df283}, journal = {Microelectronics Reliability}, keywords = {dblp}, pages = {95-98}, timestamp = {2019-09-27T10:58:13.000+0200}, title = {The variation of the leakage current characteristics of W/Ta2O5/W MIM capacitors with the thickness of the bottom W electrode.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr61.html#YuLWFDP16}, volume = 61, year = 2016 }