%0 Journal Article %1 jurgschat2022integrated %A Jurgschat, Clemens %A Roewer, Falk %A Tóth, Imre %A Ohms, Torsten %A Zimmermann, André %D 2022 %I IEEE %J Journal of microelectromechanical systems %K %N 6 %P 918-926 %R 10.1109/JMEMS.2022.3191090 %T Integrated Stress Sensors for Humidity Performance Drift Analysis and Compensation in Inertial Measurement Units %V 31

@article{jurgschat2022integrated, added-at = {2023-08-31T16:42:56.000+0200}, affiliation = {Jurgschat, C (Corresponding Author), Univ Stuttgart, Inst Micro Integrat IFM, D-70569 Stuttgart, Germany. Jurgschat, Clemens, Univ Stuttgart, Inst Micro Integrat IFM, D-70569 Stuttgart, Germany. Jurgschat, Clemens; Roewer, Falk; Ohms, Torsten, Bosch Sensortec GmbH, D-72770 Reutlingen, Germany. Toth, Imre, Robert Bosch Kft, H-1475 Budapest, Hungary. Zimmermann, Andre, Univ Stuttgart, Inst Microintegrat IFM, D-70569 Stuttgart, Germany. Zimmermann, Andre, Hahn Schickard, D-70569 Stuttgart, Germany.}, author = {Jurgschat, Clemens and Roewer, Falk and Tóth, Imre and Ohms, Torsten and Zimmermann, André}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/29f6bb94c02233e3661bce858b357c70a/puma-wartung}, doi = {10.1109/JMEMS.2022.3191090}, interhash = {db1c30ba2e58c2dc4fba3ad694e82b6f}, intrahash = {9f6bb94c02233e3661bce858b357c70a}, issn = {{1057-7157} and {1941-0158}}, journal = {Journal of microelectromechanical systems}, keywords = {}, language = {eng}, number = 6, pages = {918-926}, publisher = {IEEE}, research-areas = {Engineering; Science & Technology - Other Topics; Instruments & Instrumentation; Physics}, timestamp = {2023-08-31T14:42:56.000+0200}, title = {Integrated Stress Sensors for Humidity Performance Drift Analysis and Compensation in Inertial Measurement Units}, unique-id = {WOS:000854546300001}, volume = 31, year = 2022 }