%0 Journal Article %1 holder2021highquality %A Holder, Daniel %A Weber, Rudolf %A Röcker, Christoph %A Kunz, Gerhard %A Bruneel, David %A Delaigue, Martin %A Graf, Thomas %A Abdou Ahmed, Marwan %D 2021 %I Optica Publishing Group %J Optics letters %K %N 2 %P 384-387 %R 10.1364/OL.411412 %T High-quality high-throughput silicon laser milling using a 1 kW sub-picosecond laser %V 46

@article{holder2021highquality, added-at = {2023-08-31T16:16:20.000+0200}, affiliation = {Holder, D (Corresponding Author), Univ Stuttgart, Inst Strahlwerkzeuge IFSW, Pfaffenwaldring 43, D-70569 Stuttgart, Germany. Holder, Daniel; Weber, Rudolf; Roecker, Christoph; Graf, Thomas; Ahmed, Marwan Abdou, Univ Stuttgart, Inst Strahlwerkzeuge IFSW, Pfaffenwaldring 43, D-70569 Stuttgart, Germany. Kunz, Gerhard, Robert Bosch GmbH, Robert Bosch Campus 1, D-71272 Renningen, Germany. Bruneel, David, Lasea, Rue Chasseurs Ardennais 10, B-4031 Angleur, Belgium. Delaigue, Martin, Amplitude Syst, 11 Ave Canteranne, F-33600 Pessac, France.}, author = {Holder, Daniel and Weber, Rudolf and Röcker, Christoph and Kunz, Gerhard and Bruneel, David and Delaigue, Martin and Graf, Thomas and Abdou Ahmed, Marwan}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/29ac777a55ac01d892c2cacee731bab24/puma-wartung}, doi = {10.1364/OL.411412}, interhash = {c0108aa4d7448f7f6029e4e1278df42c}, intrahash = {9ac777a55ac01d892c2cacee731bab24}, issn = {{0146-9592} and {1539-4794}}, journal = {Optics letters}, keywords = {}, language = {eng}, number = 2, pages = {384-387}, publisher = {Optica Publishing Group}, research-areas = {Optics}, timestamp = {2023-08-31T14:16:20.000+0200}, title = {High-quality high-throughput silicon laser milling using a 1 kW sub-picosecond laser}, unique-id = {ISI:000608835900058}, volume = 46, year = 2021 }