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%0 Conference Paper
%1 menold2019laser
%A Menold, T.
%A Lanoy, F.
%A Ametowobla, M.
%A Hinderberger, S.
%A Ohmer, K.
%A Köhler, Jürgen R.
%A Werner, Jürgen Heinz
%B Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV
%D 2019
%I SPIE
%K
%P 109050X
%R 10.1117/12.2508686
%T Laser Induced Crystal Defects in Monocrystalline Silicon
%@ 978-1-5106-2453-5
@inproceedings{menold2019laser,
added-at = {2023-08-31T16:36:41.000+0200},
author = {Menold, T. and Lanoy, F. and Ametowobla, M. and Hinderberger, S. and Ohmer, K. and Köhler, Jürgen R. and Werner, Jürgen Heinz},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/207da28dd8b34df0d73bda7b8706db70a/puma-wartung},
booktitle = {Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV},
doi = {10.1117/12.2508686},
eventdate = {2019-02-04/2019-02-06},
eventtitle = {Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV},
interhash = {bc4aeb3ca32229789fe0c8272c08ecb2},
intrahash = {07da28dd8b34df0d73bda7b8706db70a},
isbn = {978-1-5106-2453-5},
keywords = {},
language = {eng},
pages = {109050X},
publisher = {SPIE},
series = {Proceedings},
timestamp = {2023-08-31T14:36:41.000+0200},
title = {Laser Induced Crystal Defects in Monocrystalline Silicon},
venue = {San Francisco, USA},
year = 2019
}
