%0 Conference Paper %1 evangelosa-maoauct2012 %A Angelopoulos, Evangelos %A Alshahed, Muhammad Samir %A Appel, Wolfgang %A Endler, Stefan %A Ferwana, Saleh %A Harendt, Christine %A Hassan, Mahadi-Ul %A Rempp, Horst %A Zimmermann, Martin %A Burghartz, Joachim N. %B 2012 Proceedings of the European Solid-State Device Research Conference (ESSDERC) %C Piscataway, New Jersey %D 2012 %I IEEE %K INES %P 141-144 %R 10.1109/ESSDERC.2012.6343353 %T Manufacturing aspects of an ultra-thin chip technology %@ 978-1-4673-1707-8 and 978-1-4673-1708-5 and 978-1-4673-1706-1

@inproceedings{evangelosa-maoauct2012, added-at = {2019-03-12T17:04:35.000+0100}, address = {Piscataway, New Jersey}, author = {Angelopoulos, Evangelos and Alshahed, Muhammad Samir and Appel, Wolfgang and Endler, Stefan and Ferwana, Saleh and Harendt, Christine and Hassan, Mahadi-Ul and Rempp, Horst and Zimmermann, Martin and Burghartz, Joachim N.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2fed9333388965441ae809bf2005a44b6/kevin.konnerth}, booktitle = {2012 Proceedings of the European Solid-State Device Research Conference (ESSDERC)}, doi = {10.1109/ESSDERC.2012.6343353}, eventdate = {2012-09-17/2012-09-21}, eventtitle = {European Solid-State Device Research Conference (ESSDERC)}, interhash = {aa10c1e5bd04d7e7d2300fec9b9f022e}, intrahash = {fed9333388965441ae809bf2005a44b6}, isbn = {{978-1-4673-1707-8} and {978-1-4673-1708-5} and {978-1-4673-1706-1}}, issn = {{1930-8876} and {2378-6558} and {1930-8876}}, keywords = {INES}, pages = {141-144}, publisher = {IEEE}, timestamp = {2019-03-12T16:17:15.000+0100}, title = {Manufacturing aspects of an ultra-thin chip technology}, venue = {Bordeaux, France}, year = 2012 }