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%0 Conference Paper
%1 schulz2015identifikation
%A Schulz, Andreas
%A Gaiser, Sandra
%A Leins, Martina
%A Merli, Stefan
%A Petto, Heinz
%A Troia, Mariagrazia
%A Walker, Matthias
%A Hirth, Thomas
%D 2015
%K
%T Identifikation und Lokalisierung von Pinholes in Isolations- und Diffusionsbarriereschichten
@inproceedings{schulz2015identifikation,
added-at = {2023-08-31T16:12:20.000+0200},
author = {Schulz, Andreas and Gaiser, Sandra and Leins, Martina and Merli, Stefan and Petto, Heinz and Troia, Mariagrazia and Walker, Matthias and Hirth, Thomas},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/287532e6f2329559a8ff3863ec6704d4f/puma-wartung},
eventdate = {2015-05-11},
eventtitle = {PLASMA Germany - Frühjahrsitzung 2015},
howpublished = {Präsentation},
interhash = {a7d78d15aa901bb338c310a7a7565684},
intrahash = {87532e6f2329559a8ff3863ec6704d4f},
keywords = {},
language = {ger},
timestamp = {2023-08-31T14:12:20.000+0200},
title = {Identifikation und Lokalisierung von Pinholes in Isolations- und Diffusionsbarriereschichten},
venue = {Göttingen},
year = 2015
}
