%0 Conference Paper %1 stodolka2005fabrication %A Stodolka, Jörg %A Nau, Dietmar %A Frommberger, Michael %A Zanke, Christel %A Gießen, Harald %A Quandt, Eckhard %B Micro- and Nano-Engineering 2004 %C Amsterdam %D 2005 %E Kruit, Peter %I Elsevier %K %N 78/79 %P 442-447 %R 10.1016/j.mee.2004.12.056 %T Fabrication of two-dimensional hybrid photonic crystals utilizing electron beam lithography

@inproceedings{stodolka2005fabrication, added-at = {2023-08-31T16:30:01.000+0200}, address = {Amsterdam}, author = {Stodolka, Jörg and Nau, Dietmar and Frommberger, Michael and Zanke, Christel and Gießen, Harald and Quandt, Eckhard}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2f9f153674b48afa07443c76a387b4899/puma-wartung}, booktitle = {Micro- and Nano-Engineering 2004}, doi = {10.1016/j.mee.2004.12.056}, editor = {Kruit, Peter}, eventdate = {2004-09-19/2004-09-22}, eventtitle = {30th International Conference on Micro and Nanoengineering}, interhash = {a2813f89b598042dbbee4051799c447b}, intrahash = {f9f153674b48afa07443c76a387b4899}, keywords = {}, language = {eng}, number = {78/79}, pages = {442-447}, publisher = {Elsevier}, series = {Microelectronic engineering}, timestamp = {2023-08-31T14:30:01.000+0200}, title = {Fabrication of two-dimensional hybrid photonic crystals utilizing electron beam lithography}, venue = {Rotterdam}, year = 2005 }