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%0 Conference Paper
%1 conf/essderc/Suarez-SegoviaL15
%A Suarez-Segovia, Carlos
%A Leroux, Charles
%A Domengie, Florian
%A Dabertrand, Karen
%A Joseph, Vincent
%A Romano, Giovanni
%A Caubet, Pierre
%A Zoll, Stephane
%A Weber, Olivier
%A Ghibaudo, Gérard
%A Reimbold, Gilles
%A Haond, Michel
%B ESSDERC
%D 2015
%I IEEE
%K dblp
%P 246-249
%T Effective work function engineering by sacrificial lanthanum diffusion on HfON-based 14 nm NFET devices.
%U http://dblp.uni-trier.de/db/conf/essderc/essderc2015.html#Suarez-SegoviaL15
%@ 978-1-4673-7135-3
@inproceedings{conf/essderc/Suarez-SegoviaL15,
added-at = {2015-11-20T00:00:00.000+0100},
author = {Suarez-Segovia, Carlos and Leroux, Charles and Domengie, Florian and Dabertrand, Karen and Joseph, Vincent and Romano, Giovanni and Caubet, Pierre and Zoll, Stephane and Weber, Olivier and Ghibaudo, Gérard and Reimbold, Gilles and Haond, Michel},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2640535278bb5cc4f455315f3396f88fb/dblp},
booktitle = {ESSDERC},
crossref = {conf/essderc/2015},
ee = {http://dx.doi.org/10.1109/ESSDERC.2015.7324760},
interhash = {984fab368292d3098f8066f5606e2e9c},
intrahash = {640535278bb5cc4f455315f3396f88fb},
isbn = {978-1-4673-7135-3},
keywords = {dblp},
pages = {246-249},
publisher = {IEEE},
timestamp = {2016-02-02T14:26:43.000+0100},
title = {Effective work function engineering by sacrificial lanthanum diffusion on HfON-based 14 nm NFET devices.},
url = {http://dblp.uni-trier.de/db/conf/essderc/essderc2015.html#Suarez-SegoviaL15},
year = 2015
}