%0 Journal Article %1 tiedemann2021cylindrical %A Tiedemann, Dominik %A Hofmann, Patrick %A Emmerlich, Jens %A Chan, Yung-An %A Ulrich, Sven %A Herdrich, Georg Heinrich %A Müller, Matthias %D 2021 %I Elsevier %J Vacuum %K %N November %P 110502 %R 10.1016/j.vacuum.2021.110502 %T Cylindrical inertial electrostatic confinement plasma source for surface treatment %V 193

@article{tiedemann2021cylindrical, added-at = {2023-08-31T16:05:55.000+0200}, affiliation = {Tiedemann, D (Corresponding Author), Robert Bosch Mfg Solut GmbH, Wernerstr 51, D-70469 Stuttgart, Germany. Tiedemann, Dominik; Hofmann, Patrick; Emmerlich, Jens; Mueller, Matthias, Robert Bosch Mfg Solut GmbH, Wernerstr 51, D-70469 Stuttgart, Germany. Ulrich, Sven, Karlsruhe Inst Technol, Inst Appl Mat, Hermann von Helmholtz Pl 1, D-76344 Eggenstein Leopoldshafen, Germany. Chan, Yung-An; Herdrich, Georg, Univ Stuttgart, Inst Space Syst, Pfaffenwaldring 29, D-70569 Stuttgart, Germany.}, author = {Tiedemann, Dominik and Hofmann, Patrick and Emmerlich, Jens and Chan, Yung-An and Ulrich, Sven and Herdrich, Georg Heinrich and Müller, Matthias}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/29ac30ac4270d82c7983648efbc742c9f/puma-wartung}, doi = {10.1016/j.vacuum.2021.110502}, interhash = {2c13b845d4a342773635540e0e2615ad}, intrahash = {9ac30ac4270d82c7983648efbc742c9f}, issn = {{0042-207X} and {1879-2715}}, journal = {Vacuum}, keywords = {}, language = {eng}, number = {November}, pages = 110502, publisher = {Elsevier}, research-areas = {Materials Science; Physics}, timestamp = {2023-08-31T14:05:55.000+0200}, title = {Cylindrical inertial electrostatic confinement plasma source for surface treatment}, unique-id = {WOS:000704086900002}, volume = 193, year = 2021 }