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%0 Thesis
%1 rommel2018resolution
%A Rommel, Marcus
%C Stuttgart
%D 2018
%K
%R 10.18419/opus-9923
%T High resolution electron beam lithography : an improved understanding of a versatile lithography technique
@phdthesis{rommel2018resolution,
added-at = {2023-08-31T16:17:02.000+0200},
address = {Stuttgart},
author = {Rommel, Marcus},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2c623bad5cf81b35656e423e88c4d6480/puma-wartung},
doi = {10.18419/opus-9923},
eventdate = {2018-03-22},
interhash = {26512e7781cdcf4ac0cb8c6ecab4eded},
intrahash = {c623bad5cf81b35656e423e88c4d6480},
keywords = {},
language = {eng},
school = {Universität Stuttgart},
supervisor = {Weis, Jürgen},
supervisorgnd = {1162855274},
timestamp = {2023-08-31T14:17:02.000+0200},
title = {High resolution electron beam lithography : an improved understanding of a versatile lithography technique},
type = {Dissertation},
year = 2018
}
