%0 Conference Paper %1 conf/nems/LuZLXCWC19 %A Lu, Yulan %A Zhang, Sen %A Li, Yadong %A Xie, Bo %A Chen, Deyong %A Wang, Junbo %A Chen, Jian %B NEMS %D 2019 %I IEEE %K dblp %P 488-491 %T A High-sensitivity, Small-size Resonant Pressure Microsensor Based on Optimized Resonator-diaphragm Structure. %U http://dblp.uni-trier.de/db/conf/nems/nems2019.html#LuZLXCWC19 %@ 978-1-7281-1629-7

@inproceedings{conf/nems/LuZLXCWC19, added-at = {2019-12-09T00:00:00.000+0100}, author = {Lu, Yulan and Zhang, Sen and Li, Yadong and Xie, Bo and Chen, Deyong and Wang, Junbo and Chen, Jian}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/27a7f8c4c06f2d2f38068bcd777a2d3d8/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2019}, ee = {https://doi.org/10.1109/NEMS.2019.8915640}, interhash = {0e83f21602d39d88686ac32f293db2b4}, intrahash = {7a7f8c4c06f2d2f38068bcd777a2d3d8}, isbn = {978-1-7281-1629-7}, keywords = {dblp}, pages = {488-491}, publisher = {IEEE}, timestamp = {2019-12-11T13:02:48.000+0100}, title = {A High-sensitivity, Small-size Resonant Pressure Microsensor Based on Optimized Resonator-diaphragm Structure.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2019.html#LuZLXCWC19}, year = 2019 }