%0 Journal Article %1 hulkko2022lowpressure %A Hulkko, Johan G. %A Qiu, Ren %A Forslund, Axel %A Halvarsson, Mats %A Larsson, Henrik %A Boman, Mats %D 2022 %I Elsevier %J Surface and coatings technology %K %P 128394 %R 10.1016/j.surfcoat.2022.128394 %T Low-pressure CVD of (Tix,W1-x)Ny from WF6, TiCl4 and NH3 %V 438

@article{hulkko2022lowpressure, added-at = {2023-08-31T16:33:23.000+0200}, affiliation = {Hulkko, JG (Corresponding Author), Uppsala Univ, Dept Chem, Angstrom Lab, S-75120 Uppsala, Sweden. Hulkko, Johan G.; Boman, Mats, Uppsala Univ, Dept Chem, Angstrom Lab, S-75120 Uppsala, Sweden. Qiu, Ren; Halvarsson, Mats, Chalmers Univ Technol, Dept Phys, S-41296 Gothenburg, Sweden. Forslund, Axel; Larsson, Henrik, Royal Inst Technol KTH, Unit Struct, S-12679 Hagersten, Sweden. Forslund, Axel, Univ Stuttgart, Inst Mat Sci, D-70569 Stuttgart, Germany.}, author = {Hulkko, Johan G. and Qiu, Ren and Forslund, Axel and Halvarsson, Mats and Larsson, Henrik and Boman, Mats}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/298913a6a89f846bab49826d8f56f1d44/puma-wartung}, doi = {10.1016/j.surfcoat.2022.128394}, interhash = {0258f6a30f8a8d6d60a1675db908e8a6}, intrahash = {98913a6a89f846bab49826d8f56f1d44}, issn = {{0257-8972} and {1879-3347}}, journal = {Surface and coatings technology}, keywords = {}, language = {eng}, pages = 128394, publisher = {Elsevier}, research-areas = {Materials Science; Physics}, timestamp = {2023-08-31T14:33:23.000+0200}, title = {Low-pressure CVD of (Tix,W1-x)Ny from WF6, TiCl4 and NH3}, unique-id = {WOS:000793342600001}, volume = 438, year = 2022 }