General mathematical model for the period chirp in interference lithography. Opt. Express, (31)4:5334--5346, Optica Publishing Group, Februar 2023. [PUMA: myown chirp period Interference diffraction Laser-Interference-Lithography diffraction_grating shaping from:florianbienert mathematical Beam peer Laser beams gratings interference model Gaussian Holographic Scanning-Beam-Interference-Lithography] URL