We present a general analytical model for the calculation of the spatial distribution of the grating period, enabling the unification of all configurations of classical laser interference lithography (LIL) and scanning-beam interference lithography (SBIL) into one formalism. This is possible due to the consideration of Gaussian beams instead of point sources which allow for the accurate description of not only the laser&\#x2019;s far-field but also its near-field. The proposed model enables the calculation of the grating period, the inclination and the slant of the grating lines on arbitrarily shaped substrates, originating from the interference of arbitrarily orientated and positioned Gaussian beams.
%0 Journal Article
%1 Bienert:23
%A Bienert, Florian
%A Graf, Thomas
%A Ahmed, Marwan Abdou
%D 2023
%I Optica Publishing Group
%J Opt. Express
%K myown chirp period Interference diffraction Laser-Interference-Lithography diffraction_grating shaping from:florianbienert mathematical Beam peer Laser beams gratings interference model Gaussian Holographic Scanning-Beam-Interference-Lithography
%N 4
%P 5334--5346
%R 10.1364/OE.481887
%T General mathematical model for the period chirp in interference lithography
%U https://opg.optica.org/oe/abstract.cfm?URI=oe-31-4-5334
%V 31
%X We present a general analytical model for the calculation of the spatial distribution of the grating period, enabling the unification of all configurations of classical laser interference lithography (LIL) and scanning-beam interference lithography (SBIL) into one formalism. This is possible due to the consideration of Gaussian beams instead of point sources which allow for the accurate description of not only the laser&\#x2019;s far-field but also its near-field. The proposed model enables the calculation of the grating period, the inclination and the slant of the grating lines on arbitrarily shaped substrates, originating from the interference of arbitrarily orientated and positioned Gaussian beams.
@article{Bienert:23,
abstract = {We present a general analytical model for the calculation of the spatial distribution of the grating period, enabling the unification of all configurations of classical laser interference lithography (LIL) and scanning-beam interference lithography (SBIL) into one formalism. This is possible due to the consideration of Gaussian beams instead of point sources which allow for the accurate description of not only the laser\&\#x2019;s far-field but also its near-field. The proposed model enables the calculation of the grating period, the inclination and the slant of the grating lines on arbitrarily shaped substrates, originating from the interference of arbitrarily orientated and positioned Gaussian beams.},
added-at = {2023-02-13T10:24:21.000+0100},
author = {Bienert, Florian and Graf, Thomas and Ahmed, Marwan Abdou},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2a8492260592f80e99852d85b3cde1c6f/ifsw},
doi = {10.1364/OE.481887},
interhash = {9a3e04001920d37b1994c5ed9ba327b8},
intrahash = {a8492260592f80e99852d85b3cde1c6f},
journal = {Opt. Express},
keywords = {myown chirp period Interference diffraction Laser-Interference-Lithography diffraction_grating shaping from:florianbienert mathematical Beam peer Laser beams gratings interference model Gaussian Holographic Scanning-Beam-Interference-Lithography},
month = feb,
number = 4,
pages = {5334--5346},
publisher = {Optica Publishing Group},
timestamp = {2023-02-13T09:30:48.000+0100},
title = {General mathematical model for the period chirp in interference lithography},
url = {https://opg.optica.org/oe/abstract.cfm?URI=oe-31-4-5334},
volume = 31,
year = 2023
}
