%0 Conference Paper %1 conf/nems/ChenZL13 %A Chen, Pei %A Zhao, Yulong %A Li, Yiyao %B NEMS %D 2013 %I IEEE %K dblp %P 681-684 %T Design, simulation and fabrication of a micromachined cantilever-based flow sensor. %U http://dblp.uni-trier.de/db/conf/nems/nems2013.html#ChenZL13

@inproceedings{conf/nems/ChenZL13, added-at = {2016-05-24T00:00:00.000+0200}, author = {Chen, Pei and Zhao, Yulong and Li, Yiyao}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2084b6df76f724a7a9fcbed3dcba454f5/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2013}, ee = {http://dx.doi.org/10.1109/NEMS.2013.6559821}, interhash = {f772d1f08a4425485d851c34686fb060}, intrahash = {084b6df76f724a7a9fcbed3dcba454f5}, keywords = {dblp}, pages = {681-684}, publisher = {IEEE}, timestamp = {2016-05-25T09:32:21.000+0200}, title = {Design, simulation and fabrication of a micromachined cantilever-based flow sensor.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2013.html#ChenZL13}, year = 2013 }