%0 Journal Article %1 journals/mr/LembergerPZBFR05 %A Lemberger, Martin %A Paskaleva, Albena %A Zürcher, Stefan %A Bauer, Anton J. %A Frey, Lothar %A Ryssel, Heiner %D 2005 %J Microelectronics Reliability %K dblp %N 5-6 %P 819-822 %T Electrical properties of hafnium silicate films obtained from a single-source MOCVD precursor. %U http://dblp.uni-trier.de/db/journals/mr/mr45.html#LembergerPZBFR05 %V 45

@article{journals/mr/LembergerPZBFR05, added-at = {2007-03-27T00:00:00.000+0200}, author = {Lemberger, Martin and Paskaleva, Albena and Zürcher, Stefan and Bauer, Anton J. and Frey, Lothar and Ryssel, Heiner}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2c293ff08ffa2e7ddeff73c3dac5de7fc/dblp}, ee = {http://dx.doi.org/10.1016/j.microrel.2004.11.040}, interhash = {f1af2a47922b5cb0b5b810c4fe76810f}, intrahash = {c293ff08ffa2e7ddeff73c3dac5de7fc}, journal = {Microelectronics Reliability}, keywords = {dblp}, number = {5-6}, pages = {819-822}, timestamp = {2016-02-02T02:01:22.000+0100}, title = {Electrical properties of hafnium silicate films obtained from a single-source MOCVD precursor.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr45.html#LembergerPZBFR05}, volume = 45, year = 2005 }