%0 Conference Paper %1 bartek2004characterization %A Bartek, Marian %A Polyakov, Aleksandr %A Sinaga, Saoer %A Mendes, Paulo Mateus %A Correia, José Higino %A N., Burghartz Joachim %B The Fifth International Conference on Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004. %C Piscataway, New Jersey %D 2004 %I IEEE %K INES %P 227-230 %R 10.1109/ASDAM.2004.1441202 %T Characterization of high-resistivity polycrystalline silicon substrates for wafer-level packaging and integration of RF passives %@ 0-7803-8335-7

@inproceedings{bartek2004characterization, added-at = {2019-03-21T17:21:10.000+0100}, address = {Piscataway, New Jersey}, author = {Bartek, Marian and Polyakov, Aleksandr and Sinaga, Saoer and Mendes, Paulo Mateus and Correia, José Higino and N., Burghartz Joachim}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/283320c4f6ad79f2a7bbb0565f1032882/kevin.konnerth}, booktitle = {The Fifth International Conference on Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004.}, doi = {10.1109/ASDAM.2004.1441202}, eventdate = {2004-10-17/2004-10-21}, eventtitle = {The Fifth International Conference on Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004.}, interhash = {eb29f636685638d37df03737c960ea8a}, intrahash = {83320c4f6ad79f2a7bbb0565f1032882}, isbn = {0-7803-8335-7}, keywords = {INES}, pages = {227-230}, publisher = {IEEE}, timestamp = {2019-03-21T16:50:08.000+0100}, title = {Characterization of high-resistivity polycrystalline silicon substrates for wafer-level packaging and integration of RF passives}, venue = {Smolenice, Slovakia}, year = 2004 }