%0 Conference Paper %1 conf/icicdt/AgarwalB12 %A Agarwal, Kanak B. %A Banerjee, Shayak %B ICICDT %D 2012 %I IEEE %K dblp %P 1-4 %T Design driven patterning optimizations for low K1 lithography. %U http://dblp.uni-trier.de/db/conf/icicdt/icicdt2012.html#AgarwalB12 %@ 978-1-4673-0146-6

@inproceedings{conf/icicdt/AgarwalB12, added-at = {2016-05-27T00:00:00.000+0200}, author = {Agarwal, Kanak B. and Banerjee, Shayak}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2d78d3ae8121f1c3e34deb3e8b48e0095/dblp}, booktitle = {ICICDT}, crossref = {conf/icicdt/2012}, ee = {http://dx.doi.org/10.1109/ICICDT.2012.6232834}, interhash = {dcfbe85cfc92785d441d63c05ac8a05b}, intrahash = {d78d3ae8121f1c3e34deb3e8b48e0095}, isbn = {978-1-4673-0146-6}, keywords = {dblp}, pages = {1-4}, publisher = {IEEE}, timestamp = {2016-05-28T09:35:28.000+0200}, title = {Design driven patterning optimizations for low K1 lithography.}, url = {http://dblp.uni-trier.de/db/conf/icicdt/icicdt2012.html#AgarwalB12}, year = 2012 }