%0 Journal Article %1 sandmaier1991lowpressure %A Sandmaier, Hermann %D 1991 %I Elsevier %J Mechatronics %K %N 4 %P 393-401 %R 10.1016/0957-4158(91)90025-6 %T Low-pressure sensor with bossed diaphragm %V 1 %X A novel design of piezoresistive, low-pressure sensors is presented. This design exhibits a number of advantages compared to conventional ones. The main objective of this development was realizing a sensor with high sensitivity, high pressure overload. and low non-linearity. This paper describes the theory of designing a piezoresistive low-pressure sensor. Through the application of a square diaphragm bossed in the center, a piezoresistive low-pressure sensor for the pressure range of ±10 kPa could be realized, exhibiting excellent sensitivity and low non-linearity of 35 mV/VF.S.O. and <|±0.05|%, respectively.

@article{sandmaier1991lowpressure, abstract = {A novel design of piezoresistive, low-pressure sensors is presented. This design exhibits a number of advantages compared to conventional ones. The main objective of this development was realizing a sensor with high sensitivity, high pressure overload. and low non-linearity. This paper describes the theory of designing a piezoresistive low-pressure sensor. Through the application of a square diaphragm bossed in the center, a piezoresistive low-pressure sensor for the pressure range of ±10 kPa could be realized, exhibiting excellent sensitivity and low non-linearity of 35 mV/VF.S.O. and <|±0.05|%, respectively.}, added-at = {2023-09-01T10:41:50.000+0200}, author = {Sandmaier, Hermann}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2eddcd136d32bc311888d7d0df2bae8b4/unibiblio-4}, doi = {10.1016/0957-4158(91)90025-6}, interhash = {d5ff4bead69686b57692a4fe51921a27}, intrahash = {eddcd136d32bc311888d7d0df2bae8b4}, issn = {0957-4158}, journal = {Mechatronics}, keywords = {}, language = {eng}, number = 4, pages = {393-401}, publisher = {Elsevier}, timestamp = {2023-09-01T08:41:50.000+0200}, title = {Low-pressure sensor with bossed diaphragm}, volume = 1, year = 1991 }