%0 Journal Article %1 journals/mr/TsangCKESLLW05 %A Tsang, C. F. %A Chang, C. K. %A Krishnamoorthy, A. %A Ee, K. Y. %A Su, Y. J. %A Li, H. Y. %A Li, W. H. %A Wong, L. Y. %D 2005 %J Microelectronics Reliability %K dblp %N 3-4 %P 517-525 %T A study of post-etch wet clean on electrical and reliability performance of Cu/low k interconnections. %U http://dblp.uni-trier.de/db/journals/mr/mr45.html#TsangCKESLLW05 %V 45

@article{journals/mr/TsangCKESLLW05, added-at = {2007-03-27T00:00:00.000+0200}, author = {Tsang, C. F. and Chang, C. K. and Krishnamoorthy, A. and Ee, K. Y. and Su, Y. J. and Li, H. Y. and Li, W. H. and Wong, L. Y.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/200555e8c0ad83c9225770e52653a7eae/dblp}, ee = {http://dx.doi.org/10.1016/j.microrel.2004.07.007}, interhash = {cd17bd7f4bd3d3899287c84f836439af}, intrahash = {00555e8c0ad83c9225770e52653a7eae}, journal = {Microelectronics Reliability}, keywords = {dblp}, number = {3-4}, pages = {517-525}, timestamp = {2016-02-02T02:00:35.000+0100}, title = {A study of post-etch wet clean on electrical and reliability performance of Cu/low k interconnections.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr45.html#TsangCKESLLW05}, volume = 45, year = 2005 }