%0 Journal Article %1 lang1995applications %A Lang, Walter %A Steiner, P. %A Sandmaier, Hermann %D 1995 %I IOP Publ. %J Journal of Micromechanics and Microengineering %K %N 2 %P 175-176 %T Applications of porous silicon microstructuring %V 5

@article{lang1995applications, added-at = {2023-09-01T10:41:50.000+0200}, author = {Lang, Walter and Steiner, P. and Sandmaier, Hermann}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/226cfd57fe3947d1c1774da6a2a01e4a4/unibiblio-4}, interhash = {ade19a86b2682bfdec65ed161239dd04}, intrahash = {26cfd57fe3947d1c1774da6a2a01e4a4}, issn = {0960-1317}, journal = {Journal of Micromechanics and Microengineering}, keywords = {}, language = {eng}, number = 2, pages = {175-176}, publisher = {IOP Publ.}, timestamp = {2023-09-01T08:41:50.000+0200}, title = {Applications of porous silicon microstructuring}, volume = 5, year = 1995 }