%0 Journal Article %1 sandmaier1993tools %A Sandmaier, Hermann %A Offereins, H. L. %A Folkmer, B. %D 1993 %I IOP Publ. %J Journal of micromechanics and microengineering %K %N 3 %P 103-106 %T CAD tools for micromechanics %V 3 %X Abstract. This paper describes the state of the art as well as demands and a concept for CAD tools supporting fast prototyping of microelectromechanical systems (MEMS). Based on commercial tools available in several engineering sciences, a more general simulator has to be developed. In future simulation tools, a general manager has to consider an interactive communication on different levels

@article{sandmaier1993tools, abstract = {Abstract. This paper describes the state of the art as well as demands and a concept for CAD tools supporting fast prototyping of microelectromechanical systems (MEMS). Based on commercial tools available in several engineering sciences, a more general simulator has to be developed. In future simulation tools, a general manager has to consider an interactive communication on different levels}, added-at = {2023-09-01T10:41:50.000+0200}, author = {Sandmaier, Hermann and Offereins, H. L. and Folkmer, B.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/29cfeb2b3b3a52a1c97fe2729baf2c95b/unibiblio-4}, interhash = {9c3d1029f071335a96625b4402aca67f}, intrahash = {9cfeb2b3b3a52a1c97fe2729baf2c95b}, issn = {0960-1317}, journal = {Journal of micromechanics and microengineering}, keywords = {}, language = {eng}, number = 3, pages = {103-106}, publisher = {IOP Publ.}, timestamp = {2023-09-01T08:41:50.000+0200}, title = {CAD tools for micromechanics}, volume = 3, year = 1993 }