An Anisotropically Etched Silicon Micro-Accelerometer with Transverse Sensivity Compensation
E. Obermeier, H. Sandmaier, and K. Kühl. An Investigation of micromechanical structures, actuators, and sensors : proceedings, New York, NY, IEEE, (1987)
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%0 Conference Paper
%1 obermeier1987anisotropically
%A Obermeier, E.
%A Sandmaier, Hermann
%A Kühl, K.
%B An Investigation of micromechanical structures, actuators, and sensors : proceedings
%C New York, NY
%D 1987
%I IEEE
%K
%T An Anisotropically Etched Silicon Micro-Accelerometer with Transverse Sensivity Compensation
@inproceedings{obermeier1987anisotropically,
added-at = {2023-09-01T10:43:04.000+0200},
address = {New York, NY},
author = {Obermeier, E. and Sandmaier, Hermann and Kühl, K.},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2d147f33df659a256406fc2b7b68888ad/unibiblio-4},
booktitle = {An Investigation of micromechanical structures, actuators, and sensors : proceedings},
eventdate = {1987-11-09/1987-11-11},
eventtitle = {IEEE Micro Robots and Teleoperators Workshop 1987},
interhash = {8cd0ea069981cf41ae57b33300e129bf},
intrahash = {d147f33df659a256406fc2b7b68888ad},
keywords = {},
language = {eng},
publisher = {IEEE},
timestamp = {2023-09-01T08:43:04.000+0200},
title = {An Anisotropically Etched Silicon Micro-Accelerometer with Transverse Sensivity Compensation},
venue = {Hyannis, Massachusetts},
year = 1987
}
