%0 Journal Article %1 Schuster2008InfluenceLineEdge %A Schuster, T. %A Rafler, S. %A Frenner, K. %A Osten, W. %D 2008 %J Proc. SPIE %K EXC310 %R 10.1117/12.814532 %T Influence of line edge roughness (LER) on angular resolved and on spectroscopic scatterometry %U http://doi.org/10.1117/12.814532 %V 7155

@article{Schuster2008InfluenceLineEdge, added-at = {2021-12-08T17:10:28.000+0100}, author = {Schuster, T. and Rafler, S. and Frenner, K. and Osten, W.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2425a266921fcc53ff9326d5204fed4c6/simtech}, doi = {10.1117/12.814532}, interhash = {72f4550b73f7869213f585f408d3af37}, intrahash = {425a266921fcc53ff9326d5204fed4c6}, journal = {Proc. SPIE}, keywords = {EXC310}, timestamp = {2023-07-31T05:42:12.000+0200}, title = {Influence of line edge roughness (LER) on angular resolved and on spectroscopic scatterometry}, url = {http://doi.org/10.1117/12.814532}, volume = 7155, year = 2008 }