%0 Journal Article %1 ducree2000development %A Ducrée, Jens %A Sandmaier, Hermann %A Lang, Walter %D 2000 %I The Japan Society of Applied Physics %J Seisan-kenkyu %K %N 6 %P 22-25 %T MEMS: From Development to Production %V 52 %X Micro electro mechanical systems (MEMS) are in the transition phase from research to industry. This paper intends to describe this process from the point of view of a European R&D institution. The MEMS market, its development and its most important products are discussed. In the second part, the R&D activities at HSG-IMIT in Germany are described. The last chapter deals with the cooperation between the R&D institution and industry, in particular with local German small-and medium-sized enterprises.

@article{ducree2000development, abstract = {Micro electro mechanical systems (MEMS) are in the transition phase from research to industry. This paper intends to describe this process from the point of view of a European R&D institution. The MEMS market, its development and its most important products are discussed. In the second part, the R&D activities at HSG-IMIT in Germany are described. The last chapter deals with the cooperation between the R&D institution and industry, in particular with local German small-and medium-sized enterprises.}, added-at = {2023-09-01T10:42:02.000+0200}, author = {Ducrée, Jens and Sandmaier, Hermann and Lang, Walter}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/292adfa1d4bfb0965ece8333350340c68/unibiblio-4}, interhash = {5c0b0c27fd0d51214d7e152bd8bbf4b3}, intrahash = {92adfa1d4bfb0965ece8333350340c68}, issn = {{1881-2058} and {0037-105X}}, journal = {Seisan-kenkyu}, keywords = {}, language = {eng}, number = 6, pages = {22-25}, publisher = {The Japan Society of Applied Physics}, timestamp = {2023-09-01T08:42:02.000+0200}, title = {MEMS: From Development to Production}, volume = 52, year = 2000 }