A 96 channel printhead for simultaneous delivery of 96 different biochemical substances in nanoliter quantities was built and tested. The printhead consists of two Pyrex layers that sandwich a Silicon wafer. The silicon was structured using Deep Reactive Ion Etching (DRIE). Critical points in the fabrication were identified and solutions presented. The final result is a printhead that works for a broad range of liquids and enables a far higher throughput in the production of biochips/microarrays as compared to currently available systems.
%0 Conference Paper
%1 heij2001channel
%A Heij, B. de
%A Békési, S.
%A Löhr, M.
%A Kattinger, G.
%A Sandmaier, Hermann
%A Zengerle, R.
%B Proceedings of the International MEMS Workshop 2001, iMEMS
%C Singapore
%D 2001
%I Future Techno Designs
%K fis liste ubs_30119
%T A 96 channel printhead for production of microarrays
%X A 96 channel printhead for simultaneous delivery of 96 different biochemical substances in nanoliter quantities was built and tested. The printhead consists of two Pyrex layers that sandwich a Silicon wafer. The silicon was structured using Deep Reactive Ion Etching (DRIE). Critical points in the fabrication were identified and solutions presented. The final result is a printhead that works for a broad range of liquids and enables a far higher throughput in the production of biochips/microarrays as compared to currently available systems.
@inproceedings{heij2001channel,
abstract = {A 96 channel printhead for simultaneous delivery of 96 different biochemical substances in nanoliter quantities was built and tested. The printhead consists of two Pyrex layers that sandwich a Silicon wafer. The silicon was structured using Deep Reactive Ion Etching (DRIE). Critical points in the fabrication were identified and solutions presented. The final result is a printhead that works for a broad range of liquids and enables a far higher throughput in the production of biochips/microarrays as compared to currently available systems.},
added-at = {2023-08-21T15:14:23.000+0200},
address = {Singapore},
author = {Heij, B. de and Békési, S. and Löhr, M. and Kattinger, G. and Sandmaier, Hermann and Zengerle, R.},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2faf4af9c64fab64deba33fd0c8f433ed/unibiblio-4},
booktitle = {Proceedings of the International MEMS Workshop 2001, iMEMS},
eventdate = {2001-07-04/2001-07-06},
eventtitle = {iMEMS},
interhash = {ab1673e2e60c4702231119c1e2b8ad6a},
intrahash = {faf4af9c64fab64deba33fd0c8f433ed},
keywords = {fis liste ubs_30119},
language = {eng},
publisher = {Future Techno Designs},
timestamp = {2023-09-01T10:41:40.000+0200},
title = {A 96 channel printhead for production of microarrays},
venue = {National University of Singapore, Singapore},
year = 2001
}
