%0 Journal Article %1 schulze1997nanometerscale %A Schulze, Th. %A Drodofsky, U. %A Brezger, B. %A Stuhler, J. %A Nowak, S. %A Pfau, T. %A Mlynek, J. %D 1997 %J Proceedings of the SPIE International Symposium on Optoelectronics ' %K Pi5 myown pi5_X %P (1997) %R 10.1117/12.273774 %T Nanometer-scale lithography with chromium and helium atoms %V '97:

@article{schulze1997nanometerscale, added-at = {2018-12-05T16:40:53.000+0100}, author = {Schulze, Th. and Drodofsky, U. and Brezger, B. and Stuhler, J. and Nowak, S. and Pfau, T. and Mlynek, J.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2f57012a8581fbb0e61911b7071fee434/pi5}, day = 10, doi = {10.1117/12.273774}, interhash = {9a14b07a7fd4cdb7b9175c017a833308}, intrahash = {f57012a8581fbb0e61911b7071fee434}, journal = {Proceedings of the SPIE International Symposium on Optoelectronics '}, keywords = {Pi5 myown pi5_X}, month = {02}, pages = {(1997)}, timestamp = {2018-12-05T15:42:58.000+0100}, title = {Nanometer-scale lithography with chromium and helium atoms}, volume = {'97:}, year = 1997 }