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Ultraprecise Printing of D-Band Transmission Lines

, , , , and . IEEE Microwave and Wireless Technology Letters, 33 (10): 1419-1422 (October 2023)
DOI: 10.1109/LMWT.2023.3300569

Abstract

This letter discusses the fabrication of coplanar waveguide (CPW) transmission lines by ultraprecise deposition (UPD) and their characterization in the $D$ -band (110–170 GHz). UPD is a direct printing process for the deposition of functional nanoinks. It has recently been introduced by XTPL as an alternative to aerosol jet and ink jet printing techniques. In UPD, a micrometer-scale nozzle is in direct contact with the substrate that is printed on. This approach allows the application of highly viscous nanoinks. A silver-filled ink with a viscosity exceeding $10^5 $ mPa $s$ is used in combination with a nozzle opening size of $5~m$ to print CPWs with an air gap of $10~m$ on Corning 1737 display glass and fused silica substrates. The lateral precision of the printing process is approximately 1– $2~m$ . To de-embed the transmission line performance, thru–reflect–line (TRL) calibration standards were manufactured on substrate. For a single, 400-nm-thick layer of the cured nanoink, the CPWs show approximately 1.0 dB/mm of loss at 140 GHz on fused silica and broadband transmission in the entire $D$ -band.

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