%0 Conference Paper
%1 lang1994applications
%A Lang, Walter
%A Steiner, P.
%A Sandmaier, Hermann
%D 1994
%K fis liste ubs_30119
%T Applications of porous silicon microstructuring
@inproceedings{lang1994applications,
added-at = {2023-08-21T15:14:23.000+0200},
author = {Lang, Walter and Steiner, P. and Sandmaier, Hermann},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2c0dd491b486845e7cdf86961c9167e01/unibiblio-4},
eventdate = {1994-09-05/1994-09-06},
eventtitle = {5th MicroMechanics Europe Workshop, MME 1994},
howpublished = {Präsentation},
interhash = {994d518eb1874c64d69879178e5819f9},
intrahash = {c0dd491b486845e7cdf86961c9167e01},
keywords = {fis liste ubs_30119},
language = {eng},
timestamp = {2023-09-01T10:41:40.000+0200},
title = {Applications of porous silicon microstructuring},
venue = {Pisa, Italy},
year = 1994
}