This paper presents a new generation of micromachined membrane switches containing a glass substrate and a silicon membrane. Upon external actuation, two planar substrate contacts are closed by a metal layer deposited on the switching membrane. The switching position is constant to better than 1 ?m and has been observed to move about 0.7 ?m over the achieved lifetime of 20 million electromechanical cycles under electrical loads of 12 V and 10 mA
%0 Journal Article
%1 hiltmann2002micromachined
%A Hiltmann, Kai
%A Schumacher, Axel
%A Guttmann, Kai
%A Lemp, Engelbert
%A Sandmaier, Hermann
%A Lang, Walter
%D 2002
%I IEEE
%J IEEE transactions on components and packaging technologies
%K fis liste ubs_30119
%N 3
%P 397-401
%R 10.1109/TCAPT.2002.804611
%T New micromachined membrane switches in silicon technology
%V 25
%X This paper presents a new generation of micromachined membrane switches containing a glass substrate and a silicon membrane. Upon external actuation, two planar substrate contacts are closed by a metal layer deposited on the switching membrane. The switching position is constant to better than 1 ?m and has been observed to move about 0.7 ?m over the achieved lifetime of 20 million electromechanical cycles under electrical loads of 12 V and 10 mA
@article{hiltmann2002micromachined,
abstract = {This paper presents a new generation of micromachined membrane switches containing a glass substrate and a silicon membrane. Upon external actuation, two planar substrate contacts are closed by a metal layer deposited on the switching membrane. The switching position is constant to better than 1 ?m and has been observed to move about 0.7 ?m over the achieved lifetime of 20 million electromechanical cycles under electrical loads of 12 V and 10 mA},
added-at = {2023-08-21T15:14:23.000+0200},
author = {Hiltmann, Kai and Schumacher, Axel and Guttmann, Kai and Lemp, Engelbert and Sandmaier, Hermann and Lang, Walter},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2b2269566d1d7afa965c7b74f169ac910/unibiblio-4},
doi = {10.1109/TCAPT.2002.804611},
interhash = {fd853640d6fd8727f7cdb31dc117f796},
intrahash = {b2269566d1d7afa965c7b74f169ac910},
issn = {1521-3331},
journal = {IEEE transactions on components and packaging technologies},
keywords = {fis liste ubs_30119},
language = {eng},
number = 3,
pages = {397-401},
publisher = {IEEE},
timestamp = {2023-09-01T10:39:54.000+0200},
title = {New micromachined membrane switches in silicon technology},
volume = 25,
year = 2002
}
