%0 Conference Paper %1 liebmann1994supporting %A Liebmann, Lars W. %A Pomerene, Andrew T. S. %A de May, Daniel J. %A Lamberti, Angela C. %A Donohue, Thomas P. %A Burghartz, Joachim N. %B Proc. SPIE 2194, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing IV %D 1994 %E Patterson, David O. %K INES %N 2194 %R 10.1117/12.175816 %T Supporting early development of advanced high-performance logic with synchrotron orbital radiation lithography : a feasibility evaluation %U https://doi.org/10.1117/12.175816 %@ 0-8194-1489-1

@inproceedings{liebmann1994supporting, added-at = {2019-04-11T15:36:58.000+0200}, author = {Liebmann, Lars W. and Pomerene, Andrew T. S. and de May, Daniel J. and Lamberti, Angela C. and Donohue, Thomas P. and Burghartz, Joachim N.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2a401d29372376f4b3927b3fe35e4b4d0/kevin.konnerth}, booktitle = {Proc. SPIE 2194, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing IV}, doi = {10.1117/12.175816}, editor = {Patterson, David O.}, eventdate = {1994-02-27/1994-03-04}, eventtitle = {SPIE's 1994 Symposium on Microlithography}, interhash = {0cc2e1dfab54f582c422f445ac7043aa}, intrahash = {a401d29372376f4b3927b3fe35e4b4d0}, isbn = {0-8194-1489-1}, keywords = {INES}, number = 2194, series = {Proceedings of SPIE}, timestamp = {2019-04-11T13:58:48.000+0200}, title = {Supporting early development of advanced high-performance logic with synchrotron orbital radiation lithography : a feasibility evaluation}, url = {https://doi.org/10.1117/12.175816}, venue = {San Jose, USA}, year = 1994 }