%0 Journal Article %1 jangra2021maskless %A Jangra, Mandeep %A Arya, Dhairya Singh %A Khosla, Robin %A Sharma, Satinder K. %D 2021 %I Springer %J Microsystem technologies %K ubs_10005 ubs_20007 ubs_30069 unibibliografie wos %N 8 %P 2925-2934 %R 10.1007/s00542-021-05217-0 %T Maskless lithography : an approach to SU-8 based sensitive and high-g Z-axis polymer MEMS accelerometer %V 27

@article{jangra2021maskless, added-at = {2022-04-14T12:48:19.000+0200}, affiliation = {Sharma, SK (Corresponding Author), Indian Inst Technol IIT Mandi, Sch Comp & Elect Engn SCEE, Mandi 175005, Himachal Prades, India. Sharma, SK (Corresponding Author), Indian Inst Technol IIT, Sch Comp & Elect Engn, Mandi 175005, Himachal Prades, India. Jangra, Mandeep; Arya, Dhairya Singh; Khosla, Robin; Sharma, Satinder K., Indian Inst Technol IIT Mandi, Sch Comp & Elect Engn SCEE, Mandi 175005, Himachal Prades, India. Jangra, Mandeep, Indian Inst Technol IIT, Roorkee, Uttar Pradesh, India. Arya, Dhairya Singh, Indian Inst Technol IIT, Ctr Appl Res Elect CARE, Delhi 110016, India. Khosla, Robin, Univ Stuttgart, Inst Halbleitertech, Pfaffenwaldring 47, D-70569 Stuttgart, Germany. Khosla, Robin, Natl Inst Technol NIT, Dept Elect & Commun Engn ECE, Silchar 788010, Assam, India. Sharma, Satinder K., Indian Inst Technol IIT, Sch Comp & Elect Engn, Mandi 175005, Himachal Prades, India.}, author = {Jangra, Mandeep and Arya, Dhairya Singh and Khosla, Robin and Sharma, Satinder K.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/28a9fb1d013564516b8d7ae829da3af6b/unibiblio}, doi = {10.1007/s00542-021-05217-0}, interhash = {9c13745bbab104ba7377d6c68e76ceae}, intrahash = {8a9fb1d013564516b8d7ae829da3af6b}, issn = {{0946-7076} and {1432-1858}}, journal = {Microsystem technologies}, keywords = {ubs_10005 ubs_20007 ubs_30069 unibibliografie wos}, language = {eng}, number = 8, pages = {2925-2934}, publisher = {Springer}, research-areas = {Engineering; Science & Technology - Other Topics; Materials Science; Physics}, timestamp = {2022-04-14T10:48:19.000+0200}, title = {Maskless lithography : an approach to SU-8 based sensitive and high-g Z-axis polymer MEMS accelerometer}, unique-id = {ISI:000645515300001}, volume = 27, year = 2021 }