%0 Conference Paper %1 conf/nems/LeeSKP11 %A Lee, Dong-Yeon %A Shim, Jaesool %A Kim, Tae Song %A Park, Jae Hong %B NEMS %D 2011 %I IEEE %K dblp %P 64-67 %T Optimization of functional layers in piezoelectric thick film MEMS process. %U http://dblp.uni-trier.de/db/conf/nems/nems2011.html#LeeSKP11 %@ 978-1-61284-775-7

@inproceedings{conf/nems/LeeSKP11, added-at = {2012-06-24T00:00:00.000+0200}, author = {Lee, Dong-Yeon and Shim, Jaesool and Kim, Tae Song and Park, Jae Hong}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/20a696df6b6ad99d780d38e64ee23c920/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2011}, ee = {http://dx.doi.org/10.1109/NEMS.2011.6017296}, interhash = {2834db8b0f6e1c3168c814452e841899}, intrahash = {0a696df6b6ad99d780d38e64ee23c920}, isbn = {978-1-61284-775-7}, keywords = {dblp}, pages = {64-67}, publisher = {IEEE}, timestamp = {2016-02-02T15:31:01.000+0100}, title = {Optimization of functional layers in piezoelectric thick film MEMS process.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2011.html#LeeSKP11}, year = 2011 }