%0 Journal Article %1 Peterh_nsel_2014 %A Peterhänsel, Sandy %A Pruss, Christof %A Osten, Wolfgang %D 2014 %I The Optical Society %J Optics Letters %K %N 13 %P 3764 %R 10.1364/ol.39.003764 %T Limits of diffractometric reconstruction of line gratings when using scalar diffraction theory %U https://doi.org/10.1364%2Fol.39.003764 %V 39

@article{Peterh_nsel_2014, added-at = {2023-08-16T16:12:54.000+0200}, author = {Peterhänsel, Sandy and Pruss, Christof and Osten, Wolfgang}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/24236cead48d21822dafd8fa0177df3e9/cp}, doi = {10.1364/ol.39.003764}, interhash = {2702966e1380618e1e5368288975fe49}, intrahash = {4236cead48d21822dafd8fa0177df3e9}, journal = {Optics Letters}, keywords = {}, month = jun, number = 13, pages = 3764, publisher = {The Optical Society}, timestamp = {2023-08-16T14:12:54.000+0200}, title = {Limits of diffractometric reconstruction of line gratings when using scalar diffraction theory}, url = {https://doi.org/10.1364%2Fol.39.003764}, volume = 39, year = 2014 }