A highly productive ablation process of 100 nm thick platinum films with a processed area rate of up to 378 cm2/min is presented using radially and azimuthally polarized laser beams. This was achieved by developing a laser amplifier generating 757 fs long laser pulses at a maximum average power of 390 W and a repetition rate of 10.6 MHz with adjustable polarization states, i.e., linear, radial, and azimuthal polarization on the work piece. The pulse train emitted from the laser was synchronized to a custom-designed polygon scanner and directed into an application machine.
%0 Journal Article
%1 Loescher:21
%A Loescher, André
%A Oldorf, Paul
%A Peters, Rigo
%A Pallmann, Wolfgang
%A Resan, Bojan
%A Lesparre, Fabien
%A d'Augères, Patrick Beaure
%A Delen, Xavier
%A Balembois, Francois
%A Georges, Patrick
%A Giedl-Wagner, Roswitha
%A Loor, Ronny De
%A Graf, Thomas
%A Ahmed, Marwan Abdou
%D 2021
%I OSA
%J Opt. Express
%K Ablation Laser MultipassAmplifier RadialPolarization UltrashortPulse myown peer
%N 13
%P 19551--19565
%R 10.1364/OE.415855
%T Efficient and high-throughput ablation of platinum using high-repetition rate radially and azimuthally polarized sub-picosecond laser pulses
%U http://www.opticsexpress.org/abstract.cfm?URI=oe-29-13-19551
%V 29
%X A highly productive ablation process of 100 nm thick platinum films with a processed area rate of up to 378 cm2/min is presented using radially and azimuthally polarized laser beams. This was achieved by developing a laser amplifier generating 757 fs long laser pulses at a maximum average power of 390 W and a repetition rate of 10.6 MHz with adjustable polarization states, i.e., linear, radial, and azimuthal polarization on the work piece. The pulse train emitted from the laser was synchronized to a custom-designed polygon scanner and directed into an application machine.
@article{Loescher:21,
abstract = {A highly productive ablation process of 100 nm thick platinum films with a processed area rate of up to 378 cm2/min is presented using radially and azimuthally polarized laser beams. This was achieved by developing a laser amplifier generating 757 fs long laser pulses at a maximum average power of 390 W and a repetition rate of 10.6 MHz with adjustable polarization states, i.e., linear, radial, and azimuthal polarization on the work piece. The pulse train emitted from the laser was synchronized to a custom-designed polygon scanner and directed into an application machine.},
added-at = {2021-06-15T14:22:13.000+0200},
author = {Loescher, Andr\'{e} and Oldorf, Paul and Peters, Rigo and Pallmann, Wolfgang and Resan, Bojan and Lesparre, Fabien and d'Aug\`{e}res, Patrick Beaure and Delen, Xavier and Balembois, Francois and Georges, Patrick and Giedl-Wagner, Roswitha and Loor, Ronny De and Graf, Thomas and Ahmed, Marwan Abdou},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2701fe944aeb53086d807b8bc940fddd1/andreloescher},
doi = {10.1364/OE.415855},
interhash = {e455d26fbd86169ff9dbf801cc097e03},
intrahash = {701fe944aeb53086d807b8bc940fddd1},
journal = {Opt. Express},
keywords = {Ablation Laser MultipassAmplifier RadialPolarization UltrashortPulse myown peer},
month = jun,
number = 13,
pages = {19551--19565},
publisher = {OSA},
timestamp = {2021-06-15T12:28:26.000+0200},
title = {Efficient and high-throughput ablation of platinum using high-repetition rate radially and azimuthally polarized sub-picosecond laser pulses},
url = {http://www.opticsexpress.org/abstract.cfm?URI=oe-29-13-19551},
volume = 29,
year = 2021
}