%0 Journal Article %1 ristok2022atomic %A Ristok, Simon %A Flad, Philipp %A Gießen, Harald %D 2022 %I Optica %J Optics Express %K dfg f2022 oa oafonds ubs_10008 ubs_20014 ubs_30130 ubs_40209 unibibliografie %N 5 %P 2063-2071 %R 10.1364/OME.454475 %T Atomic layer deposition of conformal anti-reflective coatings on complex 3D printed micro-optical systems %V 12

@article{ristok2022atomic, added-at = {2022-08-15T16:34:25.000+0200}, author = {Ristok, Simon and Flad, Philipp and Gießen, Harald}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/269623dfd3f783cbf9b749b71e6b26247/unibiblio}, doi = {10.1364/OME.454475}, interhash = {b37eba0a4c33ebf64a56a24e9335ad0c}, intrahash = {69623dfd3f783cbf9b749b71e6b26247}, issn = {1094-4087}, journal = {Optics Express}, keywords = {dfg f2022 oa oafonds ubs_10008 ubs_20014 ubs_30130 ubs_40209 unibibliografie}, language = {eng}, number = 5, pages = {2063-2071}, publisher = {Optica}, timestamp = {2022-08-15T14:34:25.000+0200}, title = {Atomic layer deposition of conformal anti-reflective coatings on complex 3D printed micro-optical systems}, volume = 12, year = 2022 }