%0 Conference Paper
%1 10.1117/12.2526076
%A Manske, Eberhard
%A Fröhlich, Thomas
%A Füßl, Roland
%A Mastylo, Rostyslav
%A Blumröder, Ulrike
%A Köchert, Paul
%A Birli, Oliver
%A Ortlepp, Ingo
%A Pruß, Christof
%A Schwesinger, Folker
%A Meister, Andreas
%B Optical Measurement Systems for Industrial Inspection XI
%D 2019
%E Lehmann, Peter
%E Osten, Wolfgang
%E Jr., Armando Albertazzi Goncalves
%I SPIE
%K christof_pruss ito non-reviewed proceedings
%P 110560L
%R 10.1117/12.2526076
%T Scale spanning subnanometer metrology up to ten decades
%U https://doi.org/10.1117/12.2526076
%V 11056
@inproceedings{10.1117/12.2526076,
added-at = {2023-06-26T09:27:13.000+0200},
author = {Manske, Eberhard and Fr{\"o}hlich, Thomas and F{\"u}{\ss}l, Roland and Mastylo, Rostyslav and Blumr{\"o}der, Ulrike and K{\"o}chert, Paul and Birli, Oliver and Ortlepp, Ingo and Pru{\ss}, Christof and Schwesinger, Folker and Meister, Andreas},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/268fdd4ae4d5da12dd76ae306fffed68b/ffischer},
booktitle = {Optical Measurement Systems for Industrial Inspection XI},
doi = {10.1117/12.2526076},
editor = {Lehmann, Peter and Osten, Wolfgang and Jr., Armando Albertazzi Gon{\c{c}}alves},
interhash = {f93e62ef531db1670c110e4e9d06e2f5},
intrahash = {68fdd4ae4d5da12dd76ae306fffed68b},
keywords = {christof_pruss ito non-reviewed proceedings},
organization = {International Society for Optics and Photonics},
pages = {110560L},
publisher = {SPIE},
timestamp = {2023-08-10T10:16:06.000+0200},
title = {{Scale spanning subnanometer metrology up to ten decades}},
url = {https://doi.org/10.1117/12.2526076},
volume = 11056,
year = 2019
}
