%0 Conference Paper %1 burghartz1996monolithic %A Burghartz, Joachim N. %A Edelstein, Daniel C. %A Jenkins, Keith A. %A Jahnes, Christopher V. %A Uzoh, Cyprian E. %A O Sullivan, Eugene J. %A Chan, Kevin K. %A Soyuer, Mehmet %A Roper, P. %A Cordes, S. %B International Electron Devices Meeting : Technical Digest %C Piscataway, New Jersey %D 1996 %I IEEE %K INES firstnamemissing %P 99-102 %R 10.1109/IEDM.1996.553131 %T Monolithic spiral inductors fabricated using a VLSI Cu-damascene interconnect technology and low-loss substrates %@ 0-7803-3394-2 and 0-7803-3393-4

@inproceedings{burghartz1996monolithic, added-at = {2019-04-10T16:27:04.000+0200}, address = {Piscataway, New Jersey}, author = {Burghartz, Joachim N. and Edelstein, Daniel C. and Jenkins, Keith A. and Jahnes, Christopher V. and Uzoh, Cyprian E. and O Sullivan, Eugene J. and Chan, Kevin K. and Soyuer, Mehmet and Roper, P. and Cordes, S.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/25739314164d1346b39cace9a9a7904a1/kevin.konnerth}, booktitle = {International Electron Devices Meeting : Technical Digest}, doi = {10.1109/IEDM.1996.553131}, eventdate = {1996-12-08/1996-12-11}, eventtitle = {International Electron Devices Meeting}, interhash = {98aa6cf2bd50464553efdcb0dbd8c206}, intrahash = {5739314164d1346b39cace9a9a7904a1}, isbn = {{0-7803-3394-2} and {0-7803-3393-4}}, issn = {0163-1918}, keywords = {INES firstnamemissing}, pages = {99-102}, publisher = {IEEE}, timestamp = {2019-04-10T14:31:27.000+0200}, title = {Monolithic spiral inductors fabricated using a VLSI Cu-damascene interconnect technology and low-loss substrates}, venue = {San Francisco, USA}, year = 1996 }