%0 Conference Paper %1 Zimmermann2010a %A Zimmermann, J. %A Oliver, Sawodny %A Wolfram, Lyda %A Wolfgang, Osten %B IFAC Symposium on Mechatronic Systems %C Cambridge, MA, USA %D 2010 %I IFAC Proceeedings Volumes %K Friction ISYS Measurement Nano %N 18 %P 545--551 %R 10.3182/20100913-3-US-2015.00127 %T Model-Based Control of a High-Precision Measurement Machine for Multiscale Inspection Tasks %V 43

@inproceedings{Zimmermann2010a, added-at = {2017-11-28T18:08:48.000+0100}, address = {Cambridge, MA, USA}, author = {Zimmermann, J. and Oliver, Sawodny and Wolfram, Lyda and Wolfgang, Osten}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/26efafe84b108c04854a3ba3e271b82e5/isyspub}, booktitle = {IFAC Symposium on Mechatronic Systems}, doi = {10.3182/20100913-3-US-2015.00127}, file = {Zimmermann2010a_IFAC_Mechatronics_High_Precision_Control.pdf:..\\pdfs\\Zimmermann2010a_IFAC_Mechatronics_High_Precision_Control.pdf:PDF}, interhash = {23f7186868e69bc1669614105804a1c0}, intrahash = {6efafe84b108c04854a3ba3e271b82e5}, isys_authors = {jzimmermann}, isys_group = {MFU, OptoMech}, keywords = {Friction ISYS Measurement Nano}, month = {September}, number = 18, pages = {545--551}, publisher = {IFAC Proceeedings Volumes}, timestamp = {2017-11-28T17:08:48.000+0100}, title = {Model-Based Control of a High-Precision Measurement Machine for Multiscale Inspection Tasks}, volume = 43, year = 2010 }