%0 Journal Article %1 Dannecker:18.Trimming %A Dannecker, Benjamin %A Rumpel, Martin %A Graf, Thomas %A Ahmed, Marwan Abdou %D 2018 %I OSA %J Opt. Lett. %K YbYAG myown PolarizationShaping ThindiskLaser IntracavityBeamshaping from:b.dannecker peer OpticalElements trimming GratingWaveguideMirror manufacturing Simulatio %N 16 %P 4017--4020 %R 10.1364/OL.43.004017 %T Trimming method for a high-yield manufacturing of high-efficiency diffraction gratings %U http://ol.osa.org/abstract.cfm?URI=ol-43-16-4017 %V 43 %X The tolerances in manufacturing of fully dielectric diffraction gratings based on the leaky-mode resonance in the -1st diffraction order can be challenging, especially if the grating design exhibits high diffraction efficiency (DE) only within a comparatively narrow spectral bandwidth. To gain improved control on the spectral bandwidth exhibiting high DE, we implemented a two-step etching approach within the fabrication process of the grating. First, a dry and anisotropic etching step was used for pre-shaping the grating, followed by iterative isotropic wet-etching steps using an alkaline solution (KOH) at a temperature of 90°C to adjust the maximum efficiency around the desired wavelength with high precision. This straightforward method gave us very good control on tailoring the DE as a function of the wavelength and led to the demonstration of DEs as high as 99.7%±0.2\% in the -1st diffraction order at a wavelength of 1030 nm and of >99% in the wavelength range between 1020 and 1070 nm. The gratings were used as cavity end mirrors of an Yb:YAG thin-disk laser, generating an output power of 145 W in fundamental mode operation (M² < 1.1).

@article{Dannecker:18.Trimming, abstract = {The tolerances in manufacturing of fully dielectric diffraction gratings based on the leaky-mode resonance in the -1st diffraction order can be challenging, especially if the grating design exhibits high diffraction efficiency (DE) only within a comparatively narrow spectral bandwidth. To gain improved control on the spectral bandwidth exhibiting high DE, we implemented a two-step etching approach within the fabrication process of the grating. First, a dry and anisotropic etching step was used for pre-shaping the grating, followed by iterative isotropic wet-etching steps using an alkaline solution (KOH) at a temperature of 90°C to adjust the maximum efficiency around the desired wavelength with high precision. This straightforward method gave us very good control on tailoring the DE as a function of the wavelength and led to the demonstration of DEs as high as 99.7%±0.2\% in the -1st diffraction order at a wavelength of 1030 nm and of >99% in the wavelength range between 1020 and 1070 nm. The gratings were used as cavity end mirrors of an Yb:YAG thin-disk laser, generating an output power of 145 W in fundamental mode operation (M² < 1.1).}, added-at = {2018-08-24T11:04:14.000+0200}, author = {Dannecker, Benjamin and Rumpel, Martin and Graf, Thomas and Ahmed, Marwan Abdou}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/22faf83a183712b26943a95e04a843c40/ifsw}, doi = {10.1364/OL.43.004017}, interhash = {72930cbf8930a23089ab0bba02fe24bb}, intrahash = {2faf83a183712b26943a95e04a843c40}, journal = {Opt. Lett.}, keywords = {YbYAG myown PolarizationShaping ThindiskLaser IntracavityBeamshaping from:b.dannecker peer OpticalElements trimming GratingWaveguideMirror manufacturing Simulatio}, language = {English}, month = aug, number = 16, pages = {4017--4020}, publisher = {OSA}, timestamp = {2018-08-24T09:04:14.000+0200}, title = {Trimming method for a high-yield manufacturing of high-efficiency diffraction gratings}, url = {http://ol.osa.org/abstract.cfm?URI=ol-43-16-4017}, volume = 43, year = 2018 }