%0 Conference Paper %1 tiziani2001testing %A Tiziani, Hans J. %A Reichelt, Stephan %A Pruss, Christof %A Rocktaeschel, M. %A Hofbauer, U. %B Proc. SPIE 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication %D 2001 %E Kley, Ernst-Bernhard %E Herzig, Hans Peter %I SPIE %K ito s_reichelt %R 10.1117/12.448030 %T Testing of aspheric surfaces

@inproceedings{tiziani2001testing, added-at = {2021-09-29T11:11:18.000+0200}, author = {Tiziani, Hans J. and Reichelt, Stephan and Pruss, Christof and Rocktaeschel, M. and Hofbauer, U.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/22727d1198512504d7f7c7f538ed4ca2f/faulhaber}, booktitle = {Proc. SPIE 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication}, doi = {10.1117/12.448030}, editor = {Kley, Ernst-Bernhard and Herzig, Hans Peter}, interhash = {a4b1e510d4d8e1997f5a632892e21b0e}, intrahash = {2727d1198512504d7f7c7f538ed4ca2f}, keywords = {ito s_reichelt}, month = {11}, organization = {International Society for Optics and Photonics}, publisher = {{SPIE}}, timestamp = {2021-09-30T08:27:46.000+0200}, title = {Testing of aspheric surfaces}, year = 2001 }