%0 Conference Paper %1 ashauer1998thermal %A Ashauer, M. %A Glosch, H. %A Hedrich, F. %A Hey, N. %A Sandmaier, Hermann %A Lang, W. %B Micro-electro-mechanical systems (MEMS) 1998 : micro-manufacturing processes in MEMS and other advanced systems, applications of micro-fabrication to fluid mechanics, micro-electro-mechanical systems, computational methods for analysis, design and simulation of MEMS %C New York, N.Y. %D 1998 %E Lin, Liwei %I American Soc. of Mechanical Engineers %K fis liste ubs_30119 %N 66 %P 351-355 %R 10.1109/MEMSYS.1998.659781 %T Thermal flow sensor for liquids and gases %@ 0-7918-1596-X

@inproceedings{ashauer1998thermal, added-at = {2023-08-21T15:14:23.000+0200}, address = {New York, N.Y.}, author = {Ashauer, M. and Glosch, H. and Hedrich, F. and Hey, N. and Sandmaier, Hermann and Lang, W.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/219a49d000c4c0b7429078195edfe70d1/unibiblio-4}, booktitle = {Micro-electro-mechanical systems (MEMS) 1998 : micro-manufacturing processes in MEMS and other advanced systems, applications of micro-fabrication to fluid mechanics, micro-electro-mechanical systems, computational methods for analysis, design and simulation of MEMS}, doi = {10.1109/MEMSYS.1998.659781}, editor = {Lin, Liwei}, eventdate = {1998-11-15/1998-11-20}, eventtitle = {International Mechanical Engineering Congress and Exposition}, interhash = {1776a4ca222972123a00866820f7b33b}, intrahash = {19a49d000c4c0b7429078195edfe70d1}, isbn = {0-7918-1596-X}, keywords = {fis liste ubs_30119}, language = {eng}, number = 66, pages = {351-355}, publisher = {American Soc. of Mechanical Engineers}, series = {American Society of Mechanical Engineers / Dynamic Systems and Control Division: DSC}, timestamp = {2023-09-01T10:41:40.000+0200}, title = {Thermal flow sensor for liquids and gases}, venue = {Anaheim, CA}, year = 1998 }